Yuki Sonoda

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:30 AM - 11:30 AM P10 (BP)

Poster presentation
| 16 Amorphous and Microcrystalline Materials
| 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[15a-P10-1~5] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

9:30 AM - 11:30 AM

[15a-P10-4] Effect of SiN_x anti-reflection films and irradiation directions on the structure of poly-Si films in the formation of poly-Si films by FLA

〇(M2)Yuki Sonoda¹, Keisuke Ohdaira¹ (1.JAIST)