9:45 AM - 10:00 AM
[14a-304-3] Crystallization and Activation of As+ doped Amorphous Ge films by Excimer Laser Annealing
Keywords:Germanium, Excimer laser
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Tue. Mar 14, 2017 9:15 AM - 12:00 PM 304 (304)
Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.), Taizoh Sadoh(Kyushu Univ.)
9:45 AM - 10:00 AM
Keywords:Germanium, Excimer laser