The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[14a-304-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Tue. Mar 14, 2017 9:15 AM - 12:00 PM 304 (304)

Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.), Taizoh Sadoh(Kyushu Univ.)

11:00 AM - 11:15 AM

[14a-304-7] Single-Crystalline Sb-Doped GeSn TFT Fabricated by Lateral Liquid-Phase Growth

〇(D)Hiroshi Oka1, Takashi Tomita1, Takuji Hosoi1, Takayoshi Shimura1, Heiji Watanabe1 (1.Osaka Univ.)

Keywords:GeSn, Thin-film transistor, Liquid-phase growth