11:30 AM - 11:45 AM
[14a-304-9] Fabrication of high mobility n-type Ge film by Atmospheric Pressure Micro-Thermal-Plasma-Jet
Keywords:Atmospheric Pressure Micro-Thermal-Plasma-Jet, germanium
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[14a-304-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Tue. Mar 14, 2017 9:15 AM - 12:00 PM 304 (304)
Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.), Taizoh Sadoh(Kyushu Univ.)