1:30 PM - 3:30 PM
[14p-P1-12] Effects of Si thin film by inductively coupled plasma-assisted sputtering
Keywords:Hydrogenated amorphous silicon, Inductively Coupled Plasma
Poster presentation
8 Plasma Electronics » 8 Plasma Electronics(Poster)
Tue. Mar 14, 2017 1:30 PM - 3:30 PM P1 (BP)
1:30 PM - 3:30 PM
Keywords:Hydrogenated amorphous silicon, Inductively Coupled Plasma