[14p-P5-1~9] 1.6 Ultrasonics

[14p-P5-8] Estimation of liquid properties by inverse problem analysis based on SH-SAW sensor responses

Kento Ueda¹, 〇Jun Kondoh^1,2 (1.GSIST, Shizuoka Univ., 2.GSST, Shizuoka Univ.)

Keywords:shear horizontal surface acoustic wave sensor, inverse problem method

Liquid properties are obtained by using shear horizontal surface acoustic wave (SH-SAW) sensors. Normally, the perturbation equations are utilized to determine those. However, as the perturbation equations are approximately derived, the liquid properties do not necessarily agree with literature values. In this paper, we propose the estimation method of the liquid properties using the inverse problem method. The proposed method is based on the numerical calculation method of the SH-SAW. The experimental results was substituted into the proposed method and the liquid properties of density and viscosity were obtained. The estimated results almost agree with the literature values.