The 64th JSAP Spring Meeting, 2017

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-412-1~18] 6.2 Carbon-based thin films

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 412 (412)

Hiroki Akasaka(Titech), Yasuharu Ohgoe(Tokyo Denki Univ.), Takako Nakamura(AIST)

2:00 PM - 2:15 PM

[15p-412-4] Preparation of DLC Films using Microwave Plasma CVD in Open-air

〇Shinji Yudate1, Nori Hayashi1, Jun Natsui1, Keichiroh Yanagida1, Kazuya Yamamoto1, Hideki Motomura1, Hidetsugu Yagi1 (1.Ehime Univ.)

Keywords:Microwave Plasma CVD in Open-air, DLC