The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices and related technologies

[16p-412-1~20] 13.5 Semiconductor devices and related technologies

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 1:15 PM - 6:30 PM 412 (412)

Keiji Ikeda(TOSHIBA), Masaharu Kobayashi(Univ. of Tokyo)

4:30 PM - 4:45 PM

[16p-412-13] Enhancement of Mobility in UTB-GeOI p-MOSFETs Realized by Si-passivated Back Interface Control

〇(PC)WENHSIN CHANG1, T. Irisawa1, H. Ishii1, H. Hattori1, H. Takagi1, Y. Kurashima1, T. Maeda1 (1.AIST)

Keywords:Ge, MOSFET, Si passivation