[17p-P3-1~22] 15.4 III-V-group nitride crystals

[17p-P3-14] Basic study for thin film growth of GaN by chemical vapor deposition using Ga vapor

〇(M1)Tsuyoshi Nagase¹, Kensuke Fukasawa¹, Yuuichirou Masuda¹, Tetsuya Kouno¹, Yuuko Kominami¹, Kazuhiko Hara^2,3 (1.Shizuoka Univ., 2.Grad School of Integrated S & T, Shizuoka Univ., 3.Res Inst of Electron, Shizuoka Univ.)

Keywords:Gallim nitride, Chemical vapor deposition, Thin film growth