Yoshihide Yamaguchi

→ Search for Yoshihide Yamaguchi in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:45 PM - 2:00 PM

[20p-438-1] Selective Cyclic Etching of Lanthanum Oxide Using Formation and Desorption of Organo-Lanthanum Complex

〇Yoshihide Yamaguchi¹, Kazunori Shinoda¹, Sumiko Fujisaki¹, Yutaka Kouzuma², Kohei Kawamura², Masaru Izawa² (1.Hitachi, Ltd. R&D group, 2.Hitachi High-technologies)

▲