Takeshi Aizawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

6:30 PM - 6:45 PM

△ [20p-438-19] Improvement of Uniformity on Microwave Excited Plasma Production Using Slot Antenna

〇Takeshi Aizawa¹, Taishin Shimada¹, Yu Tanakajima¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹ (1.Kanazawa Univ.)