Masahiko Tani

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

6:45 PM - 7:00 PM

△ [20p-438-20] Surface Modification of Polytetrafluoroethylene by Atmosheric Pressure Plasma of Ar/Water Vapor Mixture Gas

〇(B)Masahiko Tani¹, Hideki Yajima², Hiroshi Furuta¹, Akimitsu Hatta¹ (1.Kochi Univ. Technol., 2.ORC Manufacturing)