Shohei Moriya

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

7:00 PM - 7:15 PM

△ [20p-438-21] Influence of plasma gas temperature and gas species on surface treatment using atmospheric pressure plasma

〇Shohei Moriya¹, Yusuke Iijima¹, Yuma Suenaga¹, Shunsuke Watanabe², Hidekazu Miyahara³, Chiaki Sato², Akitoshi Okino¹ (1.Tokyo Tech FIRST, 2.Tokyo Tech MSL, 3.School of Science, Tokyo Univ.)

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