Kazuya Nakane

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:30 PM - 2:45 PM

△ [20p-438-4] Hydrogen plasma modification mechanism of silicon nitride surface by in-situ surface analysis

〇(M1)Kazuya Nakane¹, Rene Henricus Jozef Vervuurt², Takayoshi Tsutsumi¹, Akiko Kobayashi², Nobuyoshi Kobayashi², Masaru Hori³ (1.Nagoya Univ. Eng., 2.ASM Japan, 3.Inst. of innovation for Future Society, Nagoya Univ.)

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