Junichi Hashimoto

→ Search for Junichi Hashimoto in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:15 PM - 3:30 PM

[20p-438-7] Study of formation of sidewall striation in high aspect ratio hole etching

〇Junichi Hashimoto¹, Mitsuhiro Omura¹, Takahiro Adachi¹, Yusuke Kondo¹, Masao Ishikawa¹, Junko Abe¹, Takaya Matsushita¹, Hisataka Hayashi¹ (1.Toshiba Memory Corp.)

▲