9:45 AM - 10:00 AM
[18a-233-2] The Influence of SiC Film Surface Condition for Spherical Particle Formation on The Film by De-Ionized Water Washing
Keywords:semiconductor
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Tue. Sep 18, 2018 9:30 AM - 12:00 PM 233 (233)
Masato Sone(Tokyo Tech)
9:45 AM - 10:00 AM
Keywords:semiconductor