[18a-233-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[18a-233-8] 【Highlighted Presentation】Fabrication of Optomechanical Resonator with Spiral Bull’s Eye Antenna for Wavelength Detection

〇Khemnat Penekwong¹, Shin'ichi Warisawa¹, Toshio Sugaya², Shota Hasimoto², Yukio Kawano², Reo Kometani¹ (1.Grad. Sch. of Front. Sci., Univ. of Tokyo, 2.FIRST and Dept. of EE, Tokyo Tech)

Keywords:nanomechanical resonator, surface plasmon, wavelength

In this study, optomechanical resonator was fabricated by combining spiral bull’s antenna and circular mechanical resonator for wavelength detection. Detection characteristics of the wavelength was evaluated. As a result, we confirmed the wavelength of a laser could be detected by the optomechanical resonator. We achieved wavelength detection by the proposed device.