11:00 AM - 11:15 AM
[18a-233-7] Characteristics Variability and Temperature Dependence of 3-dimensional Acceleration Sensor
Keywords:sensor
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[18a-233-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Tue. Sep 18, 2018 9:30 AM - 12:00 PM 233 (233)
Masato Sone(Tokyo Tech)