The structual and electrocal properties of HfO<sub>2</sub>:Y/Si(100) hetero epitaxial films

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Wed. Sep 19, 2018 1:45 PM - 7:00 PM 133 (133+134)

Tomoaki Yamada(Nagoya Univ.), Takeshi Yoshimura(Osaka Pref. Univ.), Takashi Eshita(Wakayama Univ.), Hiroshi Naganuma(Tohoku Univ.)

6:45 PM - 7:00 PM

〇Daiki Kamada¹, Kenshi Takada¹, Daisuke Kiriya¹, Takeshi Yoshimura¹, Atsushi Ashida¹, Norifumi Fujimura¹ (1.Osaka Pref. univ.)

Keywords:HfO2, Ferroelectrics, Epitaxial