[19p-234A-1~10] 7.3 Micro/Nano patterning and fabrication

[19p-234A-2] Penetration of Alternately Shifted and Densely Arrayed Multi-Slits through Walls of Stainless-Steel Pipes with a Diameter of 100 μm

〇Toshiyuki Horiuchi¹, Hiroshi Takahashi¹, Hiroshi Kobayashi¹, Akira Yanagida¹ (1.Tokyo Denki Univ.)

Keywords:net-like pipe with multi-slits, laser scan lithography, electrolytic etching

A novel fabrication method of precisely textured or patterned fine cylindrical pipes is under development using laser scan lithography and electrolytic etching. Here, by improving the etchant and optimizing the masking pattern sizes, 240 slits with a width of 50 µm and a length of 100 µm, and arrayed in 8 lines at every 45° angle 30 slits each were successfully penetrated through a fine stainless-steel pipe with a diameter of 100 µm.