The 79th JSAP Autumn Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[19p-234A-1~10] 7.3 Micro/Nano patterning and fabrication

Wed. Sep 19, 2018 1:30 PM - 4:15 PM 234A (234-1)

Jiro Yamamoto(HITACHI), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Kawata(Osaka Pref. Univ.)

3:30 PM - 3:45 PM

[19p-234A-8] Durability of replica mold with anti-reflection-structure made by high-hardness release-agent-free UV curable resin

〇(M1)Junya Kawauchi1, Jun Taniguchi1, Shin Hiwasa2 (1.TUS, 2.AUTEX)

Keywords:UV-NIL, moth-eye-structure

The moth-eye structure is one of the anti-reflection-structures. We fabricated the replica mold with moth-eye structure by using new development high-hardness release-agent-free UV curable resin. New development resin has grater hardness and water repellency than conventional resin. So that we expected the durability of replica mold made by new development resin. In this study, the replica mold with moth-eye structure made by new development resin was higher than that of conventional resin.