9:30 AM - 9:45 AM
[20a-233-1] Visualization of Temperature Distribution in Molten Silicon by Atmospheric Pressure Thermal Plasma Jet
Keywords:Atmospheric Pressure Thermal Plasma Jet, Non-contact Temperature Measurement
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[20a-233-1~9] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Thu. Sep 20, 2018 9:30 AM - 11:45 AM 233 (233)
Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.)