[20a-CE-1~12] 13.5 Semiconductor devices and related technologies

▼ [20a-CE-2] Reduced Subthreshold Slope Variability at High Temperature in Bulk and SOTB MOSFETs

〇(M2)Shuang Gao¹, Tomoko Mizutani¹, Kiyoshi Takeuchi¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1.IIS, Univ. of Tokyo)

Keywords:variability, temperature, subthreshold slope

This paper presents a new finding that subthreshold slope (SS) variability is reduced at high temperature, owing to a negative correlation between SS and its temperature coefficient dSS/dT. To explain this, an effective current path model is proposed, and verified by 3D TCAD simulation.