The 79th JSAP Autumn Meeting, 2018

Presentation information

Oral presentation

13 Semiconductors » 13.7 Compound and power electron devices and process technology

[21p-331-1~8] 13.7 Compound and power electron devices and process technology

Fri. Sep 21, 2018 1:45 PM - 4:00 PM 331 (International Conference Room)

Toshiharu Kubo(Nagoya Inst. of Tech.)

3:45 PM - 4:00 PM

[21p-331-8] Fundamental study on reducing on-resistance by introducing strain into silicon vertical power device

Takeya Inoue1, Takuya Hoshii1, Kuniyuki Kakushima1, Hitoshi Wakabayashi1, Hiroshi Iwai1, Kazuo Tsutui1 (1.Tokyo Tech)

Keywords:silicon vertical power device, Piezoresistive effect