Wu Li

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 5:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-C101-1~6] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

5:15 PM - 5:30 PM

[17p-C101-6] Crystallinity Improvement in B-Doped Si and Its Influence upon Si-Ge p⁺-n Junctions Formed by ECR Ar Plasma CVD

〇(DC)Wu Li¹, Naofumi Ueno¹, Nagafumi Kato¹, Masao Sakuraba¹, Hisanao Akima¹, Shigeo Sato¹ (1.Tohoku Univ.)