Yoshiki Akita

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 5:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-C101-1~6] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

4:00 PM - 4:15 PM

△ [17p-C101-1] Effect of SiO_x capping film on crystallization of Ge film by flash lamp annealing

〇(B)Yoshiki Akita¹, Akira Heya¹, Naoto Matsuo¹, Kazuyuki Kohama², Kazuhiro Ito² (1.univ.of Hyogo, 2.univ. of Osaka)