Satoru Yoshimura

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:15 PM - 6:15 PM C201 (52-201)

Oral presentation
| 8 Plasma Electronics
| 8.5 Plasma phenomena, emerging area of plasmas and their new applications

[17p-C201-1~19] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

1:30 PM - 1:45 PM

[17p-C201-2] Low-Energy Silicon Molecular Ion Beam Production for SiO Film Formation

〇Satoru Yoshimura¹, Satoshi Sugimoto¹, Takae Takeuchi², Kensuke Murai³, Masato Kiuchi^1,3 (1.Osaka Univ., 2.Nara Women's Univ., 3.AIST)