Tomonori Yamashita

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

12:15 PM - 12:30 PM

[17a-C101-11] Improvement of transfer yield of single-crystalline silicon films by pillar shape control using ion implantation

〇Tomonori Yamashita¹, Ryutatsu Mizukami¹, Seiichiro Higashi¹ (1.Graduate School of Advanced Sciences of Matter, Hiroshima Univ.)