Ryosuke Mochii

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:30 AM - 10:45 AM

△ [17a-C101-5] Off Current Reduction of BG poly-Si TFT by PLAS Process

〇Ryosuke Mochii¹, Mami N. Fujii¹, Yasuaki Ishikawa¹, Yuta Sugawara², Nobutake Nodera², Takao Matsumoto², Yukiharu Uraoka¹ (1.NAIST, 2.SDP Corp.)