Kaname Imokawa

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:45 AM - 12:00 PM

[17a-C101-9] Doping of Phosphorus to Poly-Si Thin Films Coated with Phosphoric Acid Solution by KrF Excimer Laser Irradiation

〇Kaname Imokawa^1,2, Nozomu Tanaka¹, Akira Suwa^1,2, Daisuke Nakamura¹, Taizoh Sadoh¹, Hiroshi Ikenoue¹ (1.Kyushu Univ., 2.Gigaphoton Next GLP Kyushu Univ.)

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