Masayuki Okugawa

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 5:30 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-C101-1~6] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

4:30 PM - 4:45 PM

[17p-C101-3] Explosive crystallization of amorphous Ge induced by electron irradiation

〇(DC)Masayuki Okugawa¹, Ryusuke Nakamura¹, Hiroshi Numakura¹, Manabu Ishimaru², Hidehiro Yasuda³ (1.Osaka Pref. Univ., 2.Kyushu Inst. Univ., 3.Osaka Univ.)

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