Keisuke Kikkawa

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:30 PM - 5:15 PM F210 (61-210)

Oral presentation
| 9 Applied Materials Science
| 9.3 Nanoelectronics

[17p-F210-1~14] 9.3 Nanoelectronics

1:30 PM - 1:45 PM

[17p-F210-1] Fabrication of small tunnel junctions by means of shadow evaporation in combination with room-temperature ALD

〇Keisuke Kikkawa¹, Naoki Ito¹, Hiroki Konno², Yoshinao Mizukaki¹, Hiroshi Shimada¹, Kensaku Kanomata³, Humihiko Hirose³ (1.Grad school, UEC, 2.UEC, 3.Yamagata Univ.)

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