Kazuya Yuge

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 6:00 PM P12 (P)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[17p-P12-1~27] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[17p-P12-27] Influence of gallium oxide interfacial layer on electrical characteristics of Al₂O₃/n-GaN capacitors

〇(M1)Kazuya Yuge^1,2, Toshihide Nabatame², Yoshihiro Irokawa², Akihiko Ohi², Naoki Ikeda², Liwen Sang², Toyohiro Chikyow², Yasuo Koide², Tomoji Ohishi¹ (1.SIT, 2.NIMS)