Yoshiyuki Seike

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:00 PM - 3:45 PM B301 (53-301)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18p-B301-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

3:30 PM - 3:45 PM

[18p-B301-10] Electrostatic Discharge Prevention in the Ultra-Pure Water Spray Cleaning of Semiconductor Chips using Induction Charging.
(2^nd Report; Consideration with Position and Shape of an Inductive charge device)

〇Yoshiyuki Seike¹, Hayato Watanabe¹, Syogo Miyagawa¹, Tatsuo Mori¹, Taishi Segawa², Yoshinori Kobayashi², Keiji Miyachi², Masahiko Amari² (1.Aichi Inst. Tech., 2.Asahi Sunac)

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