Syuhei Yonezawa

→ Search for Syuhei Yonezawa in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:00 PM - 3:45 PM B301 (53-301)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18p-B301-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

3:00 PM - 3:15 PM

[18p-B301-8] Development of trace metal analysis on a silicon wafer surface

〇Syuhei Yonezawa¹, Kazuya Dobashi¹, Shigeyuki Iwai¹, tatsuya Ichinose², Takashi Sakaguchi² (1.TokyoElectron, 2.IAS Inc.)