Masaaki Hirakawa

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:00 PM - 3:45 PM B301 (53-301)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18p-B301-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

3:15 PM - 3:30 PM

[18p-B301-9] Development of Alkaline Solution generated by Electrolysis of Organic Ammonium Salt for Wet and Cleaning Process in Semiconductor Manufacturing

〇Masaaki Hirakawa¹, Hideaki Hirabayashi², Yuji Nagashima³ (1.Toshiba, 2.Toshiba Materials, 3.Shibaura Mechatronics)