Kazuhisa Torigoe

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:15 PM - 7:30 PM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[18p-D103-1~23] 15.7 Crystal characterization, impurities and crystal defects

3:15 PM - 3:30 PM

[18p-D103-8] Competitive Gettering of Impurities between Oxide Precipitates and Film Stress in Silicon Wafers

〇Kazuhisa Torigoe¹, Toshiaki Ono¹ (1.SUMCO)