Masanori Shirai

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:15 PM - 7:30 PM E202 (57-202)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[18p-E202-1~22] 15.4 III-V-group nitride crystals

5:15 PM - 5:30 PM

[18p-E202-15] Low temperature growth of GaN by reactive sputtering

〇Masanori Shirai¹, Takuji Yamamoto¹, Satoru Takasawa¹, Satoru Ishibashi¹ (1.ULVAC,Inc.)