4:00 PM - 6:00 PM [18p-P14-14] The oxinitridation simulation of 4H-SiC with NO molecules on (0001) Si-face and (000-1) C-face 〇Takayuki Hirose1, Miki Ogasawara1, Daisuke Mori1, Yutaka Terao1 (1.Fuji Electric)