Akio Yamamoto

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:45 PM - 6:30 PM C302 (52-302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[19p-C302-1~18] 13.7 Compound and power electron devices and process technology

5:15 PM - 5:30 PM

[19p-C302-14] Effects of RIE-damaged layer removal on electrical properties of AlGaN/GaN structures prepared by AlGaN regrowth on RIE-GaN surface

〇Akio Yamamoto¹, Keito Kanatani¹, Shinya Makino¹, Masaaki Kuzuhara¹ (1.Univ. of Fukui)