Shigeru Kobayashi

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P5 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[19p-P5-1~39] 6.3 Oxide electronics

1:30 PM - 3:30 PM

△ [19p-P5-37] Development of a thin-film deposition system utilizing Bayesian optimization

〇(M1)Shigeru Kobayashi¹, Ryota Shimizu^1,2, Yasunobu Ando³, Kazunori Nishio¹, Taro Hitosugi¹ (1.Tokyo Tech, 2.JST-PRESTO, 3.AIST)