Hyuga Taniguchi

→ Search for Hyuga Taniguchi in Google Scholar

Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:45 AM - 12:45 PM B303 (53-303)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[20a-B303-1~11] 7.2 Applications and technologies of electron beams

12:30 PM - 12:45 PM

△ [20a-B303-11] Evaluation of HPPMS process with Kr discharge gas
for the fabrication of Spindt emitter cathod

〇Hyuga Taniguchi¹, Takeo Nakano¹, Kei Oya¹, Masayoshi Nagao², Hisashi Ohsaki², Katsuhisa Murakami² (1.Seikei Univ., 2.AIST.)