Noriaki Toyoda

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 11:45 AM B403 (53-403)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[20a-B403-1~10] 7.5 Ion beams

9:45 AM - 10:00 AM

[20a-B403-4] Metal Etching by Gas Cluster Ion Beams with Acetylacetone Vapor

〇Noriaki Toyoda¹, Akira Okamoto¹ (1.Grad. School of Eng., Univ. of Hyogo)