Satoshi Fujii

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:15 AM - 12:15 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

12:00 PM - 12:15 PM

[20a-C101-11] Fabrication of SAW resonators on single-crystal diamonds using Minimal-Fab process II

Masaya Negawa¹, Hiroki Kamehama¹, 〇Satoshi Fujii^1,2, Haruki Toonoe³ (1.NIT, Okinawa Coll., 2.Tokyo Tech, 3.Yokogawa S. S. Corp.)