Kazuhiro Koga

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:15 AM - 12:15 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:15 AM - 11:30 AM

[20a-C101-8] Study of TiN Gate SOI-CMOS process by minimal fab

〇Kazuhiro Koga¹, Y. X. Liu², Fumito Imura^1,2, Masashi Kase², Shuichi Noda^1,2, Kazumasa Nemoto², Somawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal, 2.AIST)

11:30 AM - 11:45 AM

[20a-C101-9] TiN Gate SOI pMOS Fabrication by minimal fab

〇Kazuhiro Koga¹, Y. X. Liu², Fumito Imura^1,2, Masashi Kase², Shuichi Noda^1,2, Kazumasa Nemoto², Somawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal, 2.AIST)

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