Yoshitaro Sakata

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:15 AM - 12:00 PM F202 (61-202)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.5 Instrumentation, measurement and Metrology

[20a-F202-1~9] 1.5 Instrumentation, measurement and Metrology

9:15 AM - 9:30 AM

[20a-F202-1] Attempt to Detect Micro Scratch on Surface of SiC Substrate Using Stress Induced Light Scattering Method

〇Yoshitaro Sakata¹, Nao Terasaki¹ (1.AIST)