Takuya Uehara

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:00 PM - 4:15 PM B401 (53-401)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20p-B401-1~12] 7.3 Micro/Nano patterning and fabrication

2:15 PM - 2:30 PM

[20p-B401-6] Comparison of organic/inorganic hybridization of UV-cured resin films between exposure methods of an inorganic precursor

〇Takuya Uehara¹, Yuki Ozaki¹, Nobuya Hiroshiba¹, Takahiro Nakamura¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

2:45 PM - 3:00 PM

[20p-B401-7] UV nanoimprint lithography based on area-selective atomic layer deposition

〇Takuya Uehara¹, Yuki Ozaki¹, Nobuya Hiroshiba¹, Takahiro Nakamura¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

3:00 PM - 3:15 PM

[20p-B401-8] UV nanoimprint lithography involving a lift-off process for fabrication of Au split-ring nano-resonator arrays

〇Takuya Uehara^1,2, Giuseppe Calafiore², Scott Dhuey², Stefano Cabrini², Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ,, 2.Molecular Foundry, LBNL)