[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

△ [17p-P7-11] A Study on Brownian Noise Evaluation of High-sensitivity MEMS Accelerometers

〇Hirofumi Niijima¹, Shota Otobe¹, Motohiro Takayasu¹, Daisuke Yamane¹, Toshifumi Konishi^1,2, Teruaki Safu², Hiroyuki Ito¹, Hiroshi Toshiyoshi³, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT, 3.Univ. of Tokyo)

Keywords:MEMS accelerometer, Brownian Noise, Multi-layer Metal Technology