[18p-C201-1~7] Ion Beam and Surface Analysis: Recent Progress in Secondary Ion Mass Spectrometry (SIMS) and Its Application to Organic Analysis

[18p-C201-4] Towards high lateral resolution and high sensitivity secondary ion mass spectrometry: cluster ion beam generation from a needle emitter wetted by protic ionic liquid

〇Yukio Fujiwara¹, Naoki Saito¹ (1.AIST)

Keywords:ion beam, secondary ion, ionic liquid

For further advances in organic secondary ion mass spectrometry (SIMS), it would be necessary to develop a new primary ion source that can generate a focused cluster ion beam with high ionization efficiency. To address this issue, we have used vacuum electrospray of a protic ionic liquid propylammonium nitrate (PAN). We report on beam characteristics of PAN and SIMS results obtained.