[19a-D101-1~9] 16.3 Bulk, thin-film and other silicon-based solar cells

[19a-D101-6] Properties of i-a-Si:H passivation layer deposited by DC-superimposed RF facing target sputtering

〇(M1)Yuta Shiratori¹, Akira Faris¹, Kazuyoshi Nakada¹, Shinsuke Miyajima¹ (1.School of Engineering, Tokyo Tech.)

Keywords:Passivation, Silicon solar cells, Sputtering